▎ 摘　　要

Unsatisfied dielectric properties and inferior mechanical properties have become the main obstacles limiting the application of polybenzoxazole (PBO) in the field of microelectronics. Herein, a novel nanocomposite film was successfully developed by introducing fluorinated graphene (FG) into fluorinated PBO (FPBO). Interestingly, the FG/FPBO composite films showed an ultra-low dielectric constant of 2.02 at 1 MHz. Meanwhile, the tensile strength of the composite films increased up to 103.5 MPa, which was 25% higher than that of the pristine FPBO. Moreover, the 5% weight loss temperature of FG/FPBO composites were as high as 525 ?C, displayed an outstanding heat resistance. The water absorption of FG/FPBO films have also dropped from 1% to 0.5% due to the high hydrophobicity of FG. In short, our work provides a simple and efficient approach for the preparation of high-performance films with low dielectric constant and water absorption, as well as high mechanical strength and thermal stability.