• 文献标题:   Graphene-Based Nanoelectromechanical Periodic Array with Tunable Frequency
  • 文献类型:   Article
  • 作  者:   ZHANG QH, YING Y, ZHANG ZZ, SU ZJ, MA H, QIN GQ, SONG XX, GUO GP
  • 作者关键词:   graphene, nanoelectromechanical periodic array, electrically tunable, phononic crystal
  • 出版物名称:   NANO LETTERS
  • ISSN:   1530-6984 EI 1530-6992
  • 通讯作者地址:  
  • 被引频次:   5
  • DOI:   10.1021/acs.nanolett.1c01866 EA OCT 2021
  • 出版年:   2021

▎ 摘  要

Phononic crystals (PnCs) have attracted much attention due to their great potential for dissipation engineering and propagation manipulation of phonons. Notably, the excellent electrical and mechanical properties of graphene make it a promising material for nanoelectromechanical resonators. Transferring a graphene flake to a prepatterned periodic mechanical structure enables the realization of a PnC with on-chip scale. Here, we demonstrate a nanoelectromechanical periodic array by anchoring a graphene membrane to a 9 x 9 array of standing nanopillars. The device exhibits a quasi-continuous frequency spectrum with resonance modes distributed from similar to 120 MHz to similar to 980 MHz. Moreover, the resonant frequencies of these modes can be electrically tuned by varying the voltage applied to the gate electrode sitting underneath. Simulations suggest that the observed band-like spectrum provides an experimental evidence for PnC formation. Our architecture has large fabrication flexibility, offering a promising platform for investigations on PnCs with electrical accessibility and tunability.