• 文献标题:   Graphene interconnects fully encapsulated in layered insulator hexagonal boron nitride
  • 文献类型:   Article
  • 作  者:   JAIN N, DURCAN CA, JACOBSGEDRIM R, XU Y, YU B
  • 作者关键词:  
  • 出版物名称:   NANOTECHNOLOGY
  • ISSN:   0957-4484
  • 通讯作者地址:   SUNY Albany
  • 被引频次:   24
  • DOI:   10.1088/0957-4484/24/35/355202
  • 出版年:   2013

▎ 摘  要

We demonstrate improvements in the electrical performance of graphene interconnects with full encapsulation by lattice-matching layered insulator, hexagonal boron nitride (h-BN). A novel layer-based transfer method is developed to assemble the top passivating layer of h-BN on the graphene surface to construct the h-BN/graphene/h-BN heterostructures. The encapsulated graphene interconnects (EGIs) are characterized and compared with graphene interconnects on either SiO2 or h-BN substrates with no top passivating h-BN layer. We observe significant improvements in both the maximum current density and breakdown voltage in EGIs. Compared with the uncovered structures, EGIs also show an appreciable increase (similar to 67%) in power density at breakdown. These improvements are achieved without degrading the carrier transport characteristics in graphene wires. In addition, EGIs exhibit a minimal environment impact, showing electrical behavior insensitive to ambient conditions.