▎ 摘　　要

Due to the excellent electronic, optical, thermal, chemical, and mechanical properties of graphene, it has been applied in microdevices and nanodevices. However, there are some structural defects in graphene limiting its application in micro electromechanical systems (MEMS). These structural defects are inevitable during processing, and it is difficult to assess their effect on the micro/nano devices. Therefore, this communication used molecular dynamics to study the resonance properties of a nanoelectromechanical systems (NMES) resonator based on a graphene sheet with a single vacancy defect and edge defects. This communication focuses on three factors: vacancy types, external force, and temperature. The resonance frequencies of both types of graphene increased with external stress loading, and the resonance frequency of the graphene showed a clear step-shaped variation. Nonlinear deformation of the sheet occurred between resonant processes. When the external force was less than 15.91 nN, the resonance frequencies of the two types of graphene showed a consistent trend. The maximum frequency was up to 132.90 GHz. When the external force was less than 90 nN, the resonance frequencies of graphene with edge defects were greater and changed more rapidly. Temperature did not have a huge influence on the resonance frequencies of either type of graphene structure. The resonance frequencies of graphene with two different vacancy defects showed a consistent trend.