▎ 摘　　要

We developed a novel Monte Carlo simulation model to investigate the line width dependence of the transport properties of multi-layered graphene nanoribbon (GNR) interconnects with edge roughness. We reported that the line width dependence of carrier mobility decreases significantly as the magnitude of the edge roughness gets smaller, which agrees well with experiments. We also discussed the influence of the inelasticity of edge roughness scatterings, inter-layer tunneling, and line width dependent band structures on the line width of the GNR interconnects. (C) 2015 The Japan Society of Applied Physics