• 文献标题:   Deposition and FIB direct patterning of nanowires and nanorings into suspended sheets of graphene
  • 文献类型:   Article, Proceedings Paper
  • 作  者:   LUCOT D, GIERAK J, OUERGHI A, BOURHIS E, FAINI G, MAILLY D
  • 作者关键词:   suspended graphene, fib patterning, quantum nanostructure
  • 出版物名称:   MICROELECTRONIC ENGINEERING
  • ISSN:   0167-9317 EI 1873-5568
  • 通讯作者地址:   CNRS
  • 被引频次:   24
  • DOI:   10.1016/j.mee.2009.01.023
  • 出版年:   2009

▎ 摘  要

Graphene, a one-atom-thick layer of carbon represents a new class of materials which offers new inroads into low-dimensional physics. Nowadays a crucial problem is related to the patterning of graphene structures while keeping intact the unusual physical properties of this material. In this work, we present a way to suspend graphene sheets above electrical contacts and perform direct FIB patterning of freely suspended nanostructures like wires or rings. (C) 2009 Elsevier B.V. All rights reserved.