• 文献标题:   Non-catalytic growth of graphene-like thin film near pattern edges fabricated on SiO2 substrates
  • 文献类型:   Article
  • 作  者:   SUZUKI S, KOBAYASHI Y, MIZUNO T, MAKI H
  • 作者关键词:   carbon, chemical vapor deposition, raman scattering, electrical properties measurement, scanning electron microscopy
  • 出版物名称:   THIN SOLID FILMS
  • ISSN:   0040-6090
  • 通讯作者地址:   NTT Corp
  • 被引频次:   6
  • DOI:   10.1016/j.tsf.2010.02.027
  • 出版年:   2010

▎ 摘  要

Graphene-like thin films were grown on patterned SiO2 substrates by simple thermal chemical vapor deposition using ethanol. The film growth occurred preferentially in the vicinity of pattern edges. Catalytic metal is not necessary for the substrate or the pattern. The films consist of graphitic nanocrystals of several nanometer scale. In the electric properties, the field effect is observed at room temperature. (c) 2010 Elsevier B.V. All rights reserved.