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  • 文献标题:   Focused ion beam milling of exfoliated graphene for prototyping of electronic devices
  • 文献类型:   Article
  • 作　　者:   SCHMIDT ME, JOHARI Z, ISMAIL R, MIZUTA H, CHONG HMH
  • 作者关键词:   focused ion beam, fib assisted deposition, graphene, fib milling, prototyping
  • 出版物名称:   MICROELECTRONIC ENGINEERING
  • ISSN:   0167-9317 EI 1873-5568
  • 通讯作者地址:   Univ Southampton
  • 被引频次:   10
  • DOI:   10.1016/j.mee.2012.07.090
  • 出版年:   2012

▎ 摘　　要

We demonstrate a focused ion beam (FIB) prototyping technique that accurately aligns a two terminal contact structure to exfoliated graphene. Alignment accuracy of better than 250 nm has been achieved without direct FIB imaging of the graphene. In situ deposited tungsten is used to contact the graphene channel and the measured channel resistance is 58 k Omega. (C) 2012 Elsevier B.V. All rights reserved.