▎ 摘 要
Control over quality of graphene and the number of layers is vital for various applications. This is the first methodical report which quantitatively relates the process conditions in the chemical vapor deposition (CVD) of graphene with crystallinity and number of graphene layers, using a design of experiments approach. This report investigates the effects of three vital synthesis parameters namely (i) carbon source (benzene, naphthalene and anthracene) (ii) synthesis temperature and (iii) mass flow rate of the carbon source, on the crystallinity and the number of layers of graphene, as inferred through micro-Raman analysis. These results give a preliminary indication of how the quality of graphene synthesized through CVD could be controlled. These results throw light on further experiments, simulations, and analysis needed to precisely determine how to control the synthesis of graphene.