• 文献标题:   A design of experiments investigation of the effects of synthesis conditions on the quality of CVD graphene
  • 文献类型:   Article
  • 作  者:   SHANMUGAM R, RANGARAJAN M, DEVANATHAN S, SATHE VG, SENTHILKUMAR R, KOTHURKAR NK
  • 作者关键词:   design of experiment, cvd graphene, raman spectroscopy
  • 出版物名称:   MATERIALS RESEARCH EXPRESS
  • ISSN:   2053-1591
  • 通讯作者地址:   Amrita Univ
  • 被引频次:   3
  • DOI:   10.1088/2053-1591/3/12/125601
  • 出版年:   2016

▎ 摘  要

Control over quality of graphene and the number of layers is vital for various applications. This is the first methodical report which quantitatively relates the process conditions in the chemical vapor deposition (CVD) of graphene with crystallinity and number of graphene layers, using a design of experiments approach. This report investigates the effects of three vital synthesis parameters namely (i) carbon source (benzene, naphthalene and anthracene) (ii) synthesis temperature and (iii) mass flow rate of the carbon source, on the crystallinity and the number of layers of graphene, as inferred through micro-Raman analysis. These results give a preliminary indication of how the quality of graphene synthesized through CVD could be controlled. These results throw light on further experiments, simulations, and analysis needed to precisely determine how to control the synthesis of graphene.