• 文献标题:   SiOC-Accelerated Graphene Grown on SiO2/Si with Tunable Electronic Properties
  • 文献类型:   Article
  • 作  者:   GARMAN PD, YANG H, YEN YC, YU JF, KWAK KJ, MALKOC V, TALESARA VV, LEE LJ, LU W
  • 作者关键词:   electrical conductivity, graphene, high mobility, mechanical strength, silicon oxycarbide
  • 出版物名称:   PHYSICA STATUS SOLIDIRAPID RESEARCH LETTERS
  • ISSN:   1862-6254 EI 1862-6270
  • 通讯作者地址:   Ohio State Univ
  • 被引频次:   0
  • DOI:   10.1002/pssr.201900017
  • 出版年:   2019

▎ 摘  要

A facile method is developed for fast and high-coverage graphene growth on silicon wafers with covalent bonding by using atmospheric pressure chemical vapor deposition (APCVD) with methane as the carbon source and high temperature silicone rubber as the silicon oxycarbide (SiOC) source. The SiOC transition layer can facilitate and accelerate the formation of graphene. The formation of graphene networks with strong covalent bonding provides a combination of unique properties including higher mechanical strength and lower friction coefficient than a silicon wafer, excellent electrical conductivity, and high carrier mobility up to 275 cm(2) V-1 s(-1).