▎ 摘　　要

The high-frequency performance of top-gated graphene field-effect transistors (GFETs) depends to a large extent on the saturation velocity of the charge carriers, a velocity limited by inelastic scattering by surface optical phonons from the dielectrics surrounding the channel. In thiswork, we showthat, by simply changing the graphene channel surroundingdielectricwith amaterial having higher optical phonon energy, one could improve the transit frequency and maximum frequency of oscillation of GFETs. We fabricated GFETs on conventional SiO2/Si substrates by adding a thin Al2O3 interfacial buffer layer on top of SiO2/Si substrates, a material with about 30% higher optical phonon energy than that of SiO2, and compared performance with that of GFETs fabricated without adding the interfacial layer. From S-parameter measurements, a transit frequency and amaximumfrequency of oscillation of 43 and 46GHz, respectively, were obtained forGFETs on Al2O3 with 0.5-mu m gate length. These values are approximately 30% higher than those for state-of-the-art GFETs of the same gate length on SiO2. For relating the improvement of GFET high-frequency performance to improvements in the charge carrier saturation velocity, we used standard methods to extract the charge carrier velocity from the channel transit time. A comparison between two sets of GFETs with and without the interfacial Al2O3 layer showed that the charge carrier saturation velocity had increased from 1.5.10(7) to 2.10(7) cm/s.