• 文献标题:   Ultrafast Growth of Large Area Graphene on Si Wafer by a Single Pulse Current
  • 文献类型:   Article
  • 作  者:   GE YF, LU MM, WANG JH, XU JX, ZHAO YL
  • 作者关键词:   graphene, ultrafast growth, silicon
  • 出版物名称:   MOLECULES
  • ISSN:  
  • 通讯作者地址:  
  • 被引频次:   3
  • DOI:   10.3390/molecules26164940
  • 出版年:   2021

▎ 摘  要

Graphene has many excellent optical, electrical and mechanical properties due to its unique two-dimensional structure. High-efficiency preparation of large area graphene film is the key to achieve its industrial applications. In this paper, an ultrafast quenching method was firstly carried out to flow a single pulse current through the surface of a Si wafer with a size of 10 mm x 10 mm for growing fully covered graphene film. The wafer surface was firstly coated with a 5-nm-thick carbon layer and then a 25-nm-thick nickel layer by magnetron sputtering. The optimum quenching conditions are a pulse current of 10 A and a pulse width of 2 s. The thus-prepared few-layered graphene film was proved to cover the substrate fully, showing a high conductivity. Our method is simple and highly efficient and does not need any high-power equipment. It is not limited by the size of the heating facility due to its self-heating feature, providing the potential to scale up the size of the substrates easily. Furthermore, this method can be applied to a variety of dielectric substrates, such as glass and quartz.