• 文献标题:   Effects of ultra-violet laser irradiation on graphene
  • 文献类型:   Article
  • 作  者:   WAKAYA F, TERAOKA T, KISA T, MANABE T, ABO S, TAKAI M
  • 作者关键词:   graphene, maskless laser proces, ultraviolet laser
  • 出版物名称:   MICROELECTRONIC ENGINEERING
  • ISSN:   0167-9317
  • 通讯作者地址:   Osaka Univ
  • 被引频次:   12
  • DOI:   10.1016/j.mee.2012.04.028
  • 出版年:   2012

▎ 摘  要

Graphene can be applied for transparent electrodes instead of indium tin oxide (ITO). For patterning of ITO, the maskless laser process was reported as a simple and fast process. Raman spectra and electrical resistances of graphene were measured before and after ultra-violet laser irradiation to investigate the possibility of maskless laser process. The Raman spectrum was affected by laser irradiation (>3 MW/cm(2)), indicating defects generation. The resistance was more sensitive to laser irradiation than the Raman spectrum. (C) 2012 Elsevier B.V. All rights reserved.