• 文献标题:   Fast and controllable fabrication of suspended graphene nanopore devices
  • 文献类型:   Article
  • 作  者:   LIU S, ZHAO Q, XU J, YAN K, PENG HL, YANG FH, YOU LP, YU DP
  • 作者关键词:  
  • 出版物名称:   NANOTECHNOLOGY
  • ISSN:   0957-4484 EI 1361-6528
  • 通讯作者地址:   Peking Univ
  • 被引频次:   41
  • DOI:   10.1088/0957-4484/23/8/085301
  • 出版年:   2012

▎ 摘  要

A poly(methyl methacrylate) assisted dry transfer method was developed to transfer graphene microflake onto a suspended SiN chip in an effective and efficient way for further graphene nanopore drilling for DNA analysis. Graphene microflakes can be patterned by e-beam lithography to a designed shape and size on a large scale of a few thousands simultaneously. Subsequently, individual graphene microflakes can be picked up and transferred to a target hole on a suspended SiN membrane with 1 mu m precision via a site-specific transfer-printing method. Nanopores with different diameters from 3 to 20 nm were drilled on the as-transferred graphene membrane in a transmission electron microscope. This method offers a fast and controllable way to fabricate graphene nanopores for DNA analyses.