• 文献标题:   Impact of 2D-3D Heterointerface on Remote Epitaxial Interaction through Graphene
  • 文献类型:   Article
  • 作  者:   KIM H, LU KY, LIU YP, KUM HS, KIM KS, QIAO K, BAE SH, LEE S, JI YJ, KIM KH, PAIK H, XIE SE, SHIN H, CHOI C, LEE JH, DONG CY, ROBINSON JA, LEE JH, AHN JH, YEOM GY, SCHLOM DG, KIM J
  • 作者关键词:   remote epitaxy, graphene, singlecrystal membrane, transfer proces, ionicity, heterointegration
  • 出版物名称:   ACS NANO
  • ISSN:   1936-0851 EI 1936-086X
  • 通讯作者地址:  
  • 被引频次:   42
  • DOI:   10.1021/acsnano.1c03296 EA JUN 2021
  • 出版年:   2021

▎ 摘  要

Remote epitaxy has drawn attention as it offers epitaxy of functional materials that can be released from the substrates with atomic precision, thus enabling production and heterointegration of flexible, transferrable, and stackable freestanding single-crystalline membranes. In addition, the remote interaction of atoms and adatoms through two-dimensional (2D) materials in remote epitaxy allows investigation and utilization of electrical/chemical/physical coupling of bulk (3D) materials via 2D materials (3D-2D-3D coupling). Here, we unveil the respective roles and impacts of the substrate material, graphene, substrate-graphene interface, and epitaxial material for electrostatic coupling of these materials, which governs cohesive ordering and can lead to single-crystal epitaxy in the overlying film. We show that simply coating a graphene layer on wafers does not guarantee successful implementation of remote epitaxy, since atomically precise control of the graphene-coated interface is required, and provides key considerations for maximizing the remote electrostatic interaction between the substrate and adatoms. This was enabled by exploring various material systems and processing conditions, and we demonstrate that the rules of remote epitaxy vary significantly depending on the ionicity of material systems as well as the graphene-substrate interface and the epitaxy environment. The general rule of thumb discovered here enables expanding 3D material libraries that can be stacked in freestanding form.