• 文献标题:   High-performance humidity sensor based on plasma modified graphene
  • 文献类型:   Article
  • 作  者:   BAI L, WANG WH, YU YF, LIU KY, NI ZH
  • 作者关键词:   humidity sensor, oxygen plasma, modified graphene, defect
  • 出版物名称:   APPLIED PHYSICS EXPRESS
  • ISSN:   1882-0778 EI 1882-0786
  • 通讯作者地址:  
  • 被引频次:   1
  • DOI:   10.35848/1882-0786/ac8d48
  • 出版年:   2022

▎ 摘  要

Humidity monitoring has flourished in many advanced applications, such as environmental monitoring, industries, and medical health. Humidity devices with fast response and high sensitivity are in high demand for complicated application conditions. In this work, we bridge this gap by employing oxygen plasma treatment in a graphene-based humidity sensor. The sensitivity can be regulated from -99.2% to 153.1%, meanwhile retaining a high-speed response with rise and fall times similar to 58 ms and similar to 661 ms. This work provides a promising strategy for humidity detection with fast response and high sensitivity.