▎ 摘　　要

Porous carbon films (PCFs) containing nanographene were deposited from a gas mixture of H-2, CH4, and CO2 by pulsed discharge (PD) plasma-enhanced chemical vapor deposition (CVD) using a Ni catalytic layer, and their capacitance and conductance as an electrochemical double layer capacitor (EDLC) were investigated. The morphological study showed fiberlike structure formation with a 50-nm-thick Ni catalyst film. Nanographene-containing PCFs were deposited with a 100-nm-thick Ni film. When the Ni film thickness increased from 50 to 100nm, the capacitance increased from 13 to 152 mu F/cm(2) and the conductance increased from 2.1 to 6.8 mS/cm(2). These results show that graphene-containing PCFs are very much suitable as electrode materials of EDLCs. (C) 2012 The Japan Society of Applied Physics