• 文献标题:   Raman analysis of epitaxial graphene grown on 4H-SiC (0001) substrate under low pressure condition
  • 文献类型:   Article
  • 作  者:   WANG DC, ZHANG YM, ZHANG YM, LEI TM, GUO H, WANG YH, TANG XY, WANG H
  • 作者关键词:   sic substrate, epitaxial graphene, raman spectroscopy
  • 出版物名称:   CHINESE PHYSICS B
  • ISSN:   1674-1056 EI 1741-4199
  • 通讯作者地址:   Xidian Univ
  • 被引频次:   5
  • DOI:   10.1088/1674-1056/20/12/128101
  • 出版年:   2011

▎ 摘  要

In this paper, we report a feasible route of growing epitaxial graphene on 4H-SiC (0001) substrate in a low pressure of 4 mbar (1 bar=10(5) Pa) with an argon flux of 2 standard liters per minute at 1200, 1300, 1400, and 1500 degrees C in a commercial chemical vapour deposition SiC reactor. Using Raman spectroscopy and scanning electron microscopy, we confirm that epitaxial graphene evidently forms on SiC surface above 1300 degrees C with a size of several microns. By fitting the 2D band of Raman data with two-Lorentzian function, and comparing with the published reports, we conclude that epitaxial graphene grown at 1300 degrees C is four-layer graphene.