• 文献标题:   Imaging vibrations of electromechanical few layer graphene resonators with a moving vacuum enclosure
  • 文献类型:   Article
  • 作  者:   LU H, YANG C, TIAN Y, LU J, XU FQ, ZHANG C, CHEN FN, YING Y, SCHADLER KG, WANG CH, KOPPENS FHL, RESERBATPLANTEY A, MOSER J
  • 作者关键词:   vibration imaging, scanning microscopy, nanoelectromechanical system
  • 出版物名称:   PRECISION ENGINEERINGJOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING NANOTECHNOLOGY
  • ISSN:   0141-6359 EI 1873-2372
  • 通讯作者地址:  
  • 被引频次:   2
  • DOI:   10.1016/j.precisioneng.2021.06.012 EA AUG 2021
  • 出版年:   2021

▎ 摘  要

Imaging the vibrations of nanomechanical resonators means measuring their flexural mode shapes from the dependence of their frequency response on in-plane position. Applied to two-dimensional resonators, this technique provides a wealth of information on the mechanical properties of atomically-thin membranes. We present a simple and robust system to image the vibrations of few layer graphene (FLG) resonators at room temperature and in vacuum with an in-plane displacement precision of approximate to 0.20 mu m. It consists of a sturdy vacuum enclosure mounted on a three-axis micropositioning stage and designed for free space optical measurements of vibrations. The system is equipped with ultraflexible radio frequency transmission lines to electrically actuate resonators. With it we characterize the lowest frequency mode of FLG resonators by measuring its frequency response as a function of position on the membrane and by extracting its effective mass. We use the background noise of the undriven vibrational spectrum to calibrate in-plane displacement. Finally, we measure the first three vibration modes of a resonator whose membrane is partially folded and find that folds locally suppress vibrations.