• 文献标题:   Graphene electrodes for n-type organic field-effect transistors
  • 文献类型:   Article, Proceedings Paper
  • 作  者:   HENRICHSEN HH, BOGGILD P
  • 作者关键词:   graphene, ebeam lithography, ofet
  • 出版物名称:   MICROELECTRONIC ENGINEERING
  • ISSN:   0167-9317 EI 1873-5568
  • 通讯作者地址:   Tech Univ Denmark
  • 被引频次:   7
  • DOI:   10.1016/j.mee.2009.11.041
  • 出版年:   2010

▎ 摘  要

This work presents a convenient and contamination safe E-beam lithography process for microstructuring of graphene flakes. Exfoliated graphene flakes were deposited on oxidized silicon wafers and subsequently patterned by E-beam lithography, to be used as source and drain electrodes in an organic field-effect transistor configuration (OFET). Single tip tungsten as well as microscale multi-point probes were used to electrically contact individual devices, making permanent connections unnecessary. The device platform has been tested with a thin film of para-hexaphenylene (p6P) as the semiconducting channel material. (C) 2009 Elsevier B.V. All rights reserved.