• 文献标题:   Physics-based modeling and microwave characterization of graphene co-planar waveguides
  • 文献类型:   Article
  • 作  者:   HEO K, CHO KS, LEE JH, JANG Y, KIM S, HWANG SW, WHANG D
  • 作者关键词:   graphene, lowpressure chemical vapor deposition, coplanar waveguide, interconnect, modeling
  • 出版物名称:   PHYSICA STATUS SOLIDIRAPID RESEARCH LETTERS
  • ISSN:   1862-6254 EI 1862-6270
  • 通讯作者地址:   Korea Univ
  • 被引频次:   1
  • DOI:   10.1002/pssr.201409104
  • 出版年:   2014

▎ 摘  要

In this study, large area mono-, bi-, and multi-layer graphenes (MLG) were synthesized using low pressure chemical vapor deposition (LPCVD) process and co-planar waveguides (CPW) with graphenes being fabricated using conventional photolithography. The intrinsic room temperature radio frequency (RF) characteristics were measured via direct contact to the graphene surface with a probe-tip in the range of 0.1 GHz to 40 GHz without using metal electrodes. The device characteristics were also evaluated by physics-based RLC equivalent circuit simulation. The proposed equivalent circuit model reproduced all of the measured characteristics within 3% of RMSE and we numerically extracted the set of component values which minimize the error between the measured data and the simulation results over the measured regime. Our findings demonstrate that MLG is an effective candidate in RF interconnect device applications. (C) 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim