• 文献标题:   Air-stable n-type doping of graphene from overlying Si3N4 film
  • 文献类型:   Article
  • 作  者:   WANG ZG, LI PJ, CHEN YF, LIU JB, QI F, TIAN HJ, ZHENG BJ, ZHOU JH
  • 作者关键词:   plasma enhanced chemical vapor, deposition, graphene, si3 n4, dirac point, ntype doping
  • 出版物名称:   APPLIED SURFACE SCIENCE
  • ISSN:   0169-4332 EI 1873-5584
  • 通讯作者地址:   Univ Elect Sci Technol China
  • 被引频次:   9
  • DOI:   10.1016/j.apsusc.2014.04.107
  • 出版年:   2014

▎ 摘  要

In this study, we report a facile method to obtain air-stable n-type graphene by plasma-enhanced chemical vapor depositing Si-3 N4 film on the surface of graphene. We have demonstrated that the overlying Si3N4 film can not only act as the penetration-barrier against H2O and O-2 adsorbed on the graphene surface, but also cause an effective n-type doping due to the amine groups at the interface of graphene/Si3N4. Furthermore, the studies reveal that the Dirac point of graphene can be modulated by the thickness of Si-3 N-4 film, which is due to competing effects of Si3N4-induced doping (n-type) and penetrating H2O (O-2)-induced doping (p-type). We expect this method to be used for obtaining stable n-type graphene field-effect transistors in air, which will be widely used in graphene electronic devices. (C) 2014 Elsevier B.V. All rights reserved.