• 文献标题:   High-Resolution Laser-Induced Graphene. Flexible Electronics beyond the Visible Limit
  • 文献类型:   Article
  • 作  者:   STANFORD MG, ZHANG C, FOWLKES JD, HOFFMAN A, IVANOV IN, RACK PD, TOUR JM
  • 作者关键词:   laserinduced graphene, high resolution, flexible sensor, visible laser
  • 出版物名称:   ACS APPLIED MATERIALS INTERFACES
  • ISSN:   1944-8244 EI 1944-8252
  • 通讯作者地址:   Univ Tennessee
  • 被引频次:   8
  • DOI:   10.1021/acsami.0c01377
  • 出版年:   2020

▎ 摘  要

Laser-induced graphene (LIG) is a multifunctional graphene foam that is commonly direct-written with an infrared laser into a carbon-based precursor material. Here, a visible 405 nm laser is used to directly convert polyimide into LIG. This enabled the formation of LIG with a spatial resolution of similar to 12 mu m and a thickness of <5 mu m. The spatial resolution enabled by the relatively smaller focused spot size of the 405 nm laser represents a >60% reduction in LIG feature sizes reported in prior publications. This process occurs in situ in an SEM chamber, thus allowing direct observation of LIG formation. The reduced size of the LIG features enables the direct-write formation of flexible electronics that are not visible to the unaided eye. A humidity sensor is demonstrated which could detect human breath with a response time of 250 ms. With the growing interest in LIG for flexible electronics and sensors, finer features can greatly expand its utility.