• 文献标题:   Toward Mass Production of CVD Graphene Films
  • 文献类型:   Review
  • 作  者:   DENG B, LIU ZF, PENG HL
  • 作者关键词:   chemical vapor deposition, engineering principle, graphene, mass production, quality control
  • 出版物名称:   ADVANCED MATERIALS
  • ISSN:   0935-9648 EI 1521-4095
  • 通讯作者地址:   Peking Univ
  • 被引频次:   49
  • DOI:   10.1002/adma.201800996
  • 出版年:   2019

▎ 摘  要

Chemical vapor deposition (CVD) is considered to be an efficient method for fabricating large-area and high-quality graphene films due to its excellent controllability and scalability. Great efforts have been made to control the growth of graphene to achieve large domain sizes, uniform layers, fast growth, and low synthesis temperatures. Some attempts have been made by both the scientific community and startup companies to mass produce graphene films; however, there is a large difference in the quality of graphene synthesized on a laboratory scale and an industrial scale. Here, recent progress toward the mass production of CVD graphene films is summarized, including the manufacturing process, equipment, and critical process parameters. Moreover, the large-scale homogeneity of graphene films and fast characterization methods are also discussed, which are crucial for quality control in mass production.