▎ 摘 要
Compared with graphene, nitrogen and oxygen co-doped graphene quantum dots can make up for the limitation of graphene active sites. Here, we demonstrated the fabrication of planar on-chip micro-supercapacitors based on nitrogen and oxygen co-doped graphene quantum dots. The interdigital micro-electrodes were prepared on the surface of the electrode thin film by the photolithographic technique. Notably, the electrochemical performance of the micro-supercapacitors had significantly increased. The area capacitance was 18.74 mu F cm(-2). Furthermore, this work offered the areal energy density of 2.60 nWh cm(-2) and the areal power density of 116.43 mu W cm(-2). After 10,000 cycles at 5000 Vs(-1), the capacitance retention rate of 99.23% was obtained. Meantime, the corresponding time constant was 10.03 mu s.