• 文献标题:   Highly Monochromatic Electron Emission from Graphene/Hexagonal Boron Nitride/Si Heterostructure
  • 文献类型:   Article
  • 作  者:   MURAKAMI K, IGARI T, MITSUISHI K, NAGAO M, SASAKI M, YAMADA Y
  • 作者关键词:   hexagonal boron nitride, graphene, electron emission, fowlernordheim tunneling, metaloxidesemiconductor structure
  • 出版物名称:   ACS APPLIED MATERIALS INTERFACES
  • ISSN:   1944-8244 EI 1944-8252
  • 通讯作者地址:   Natl Inst Adv Ind Sci Technol
  • 被引频次:   2
  • DOI:   10.1021/acsami.9b17468
  • 出版年:   2020

▎ 摘  要

In this work, a planar electron emission device based on a graphene/hexagonal boron nitride (h-BN)/n-Si heterostructure is fabricated to realize highly monochromatic electron emission from a flat surface. The h-BN layer is used as an insulating layer to suppress electron inelastic scattering within the planar electron emission device. The energy spread of the emission device using the h-BN insulating layer is 0.28 eV based on the full-width at half-maximum (FWHM), which is comparable to a conventional tungsten field emitter. The characteristic spectral shape of the electron energy distributions reflected the electron distribution in the conduction band of the n-Si substrate. The results indicate that the inelastic scattering of electrons at the insulating layer is drastically suppressed by the h-BN layer. Furthermore, the maximum emission current density reached 2.4 A/cm(2), which is comparable to that of a conventional thermal cathode. Thus, the graphene/h-BN heterostructure is a promising material for planar electron emission devices to obtain a highly monochromatic electron beam and a high electron emission current density.