• 文献标题:   Complementary Two-Dimensional (2-D) FET Technology With MoS2/hBN/Graphene Stack
  • 文献类型:   Article
  • 作  者:   ESTRADA CJ, MA ZC, CHAN MS
  • 作者关键词:   electrode, boron, two dimensional display, field effect transistor, logic gate, threshold voltage, inverter, twodimensional 2d material, complementary fet, cmos inverter, molybdenum disulfide, hexagonal boron nitride, graphene, flexible electronic
  • 出版物名称:   IEEE ELECTRON DEVICE LETTERS
  • ISSN:   0741-3106 EI 1558-0563
  • 通讯作者地址:  
  • 被引频次:   1
  • DOI:   10.1109/LED.2021.3124823
  • 出版年:   2021

▎ 摘  要

This letter demonstrates a complementary 2-D field-effect transistor (FET) technology with molybdenum disulfide (MoS2) as the active film, hexagonal boron nitride (hBN) as the gate dielectric, and graphene as the gate electrode. The active region of the n-channel (n-FET) and p-channel (p-FET) devices are formed by undoped and Nb-doped MoS2, respectively. The complementary FETs have the desirable threshold voltage polarity, similar current drive, and high on-off current ratios of more than 10(6). A complementary metal-oxide-semiconductor (CMOS) inverter has been fabricated and the measured gain is about 14 with 90% noise margin at a 2 V power supply.