• 文献标题:   Towards a cleaner graphene surface in graphene field effect transistor via N,N-Dimethylacetamide
  • 文献类型:   Article
  • 作  者:   MAO DC, PENG SA, WANG SQ, ZHANG DY, SHI JY, WANG XN, JIN Z
  • 作者关键词:   graphene, field effect transistor, clean surface
  • 出版物名称:   MATERIALS RESEARCH EXPRESS
  • ISSN:   2053-1591
  • 通讯作者地址:   Chinese Acad Sci Beijing
  • 被引频次:   0
  • DOI:   10.1088/2053-1591/3/9/095011
  • 出版年:   2016

▎ 摘  要

Graphene is a two-dimensional material with a high surface to volume ratio and the fabrication process of graphene field effect transistors always introduces unintended contaminates like photoresidues on the surface of graphene. These contaminations are difficult to remove by conventional acetone solvent and suppress the intrinsic properties of graphene. To address the problem, a wet-chemical approach employing N,N-Dimethylacetamide (C4H9NO) was developed in this study, which shows an increase of the carrier mobility and a reduction of minimum conductance point in our devices. Raman spectroscopy and atomic force microscope were carried out to verify the cleaning effect of the approach. Our method provides a simple and effective way to enhance the electrical performance of graphene field effect transistors and can be readily integrated into the CMOS fabrication pilot line.