• 文献标题:   Tailored Graphene Micropatterns by Wafer-Scale Direct Transfer for Flexible Chemical Sensor Platform
  • 文献类型:   Article, Early Access
  • 作  者:   KIM Y, KIM T, LEE J, CHOI YS, MOON J, PARK SY, LEE TH, PARK HK, LEE SA, KWON MS, BYUN HG, LEE JH, LEE MG, HONG BH, JANG HW
  • 作者关键词:   2d material, chemical sensor array, finite element simulation, graphene, microscale patterning
  • 出版物名称:   ADVANCED MATERIALS
  • ISSN:   0935-9648 EI 1521-4095
  • 通讯作者地址:   Seoul Natl Univ
  • 被引频次:   0
  • DOI:   10.1002/adma.202004827 EA NOV 2020
  • 出版年:  

▎ 摘  要

2D materials, such as graphene, exhibit great potential as functional materials for numerous novel applications due to their excellent properties. The grafting of conventional micropatterning techniques on new types of electronic devices is required to fully utilize the unique nature of graphene. However, the conventional lithography and polymer-supported transfer methods often induce the contamination and damage of the graphene surface due to polymer residues and harsh wet-transfer conditions. Herein, a novel strategy to obtain micropatterned graphene on polymer substrates using a direct curing process is demonstrated. Employing this method, entirely flexible, transparent, well-defined self-activated graphene sensor arrays, capable of gas discrimination without external heating, are fabricated on 4 in. wafer-scale substrates. Finite element method simulations show the potential of this patterning technique to maximize the performance of the sensor devices when the active channels of the 2D material are suspended and nanoscaled. This study contributes considerably to the development of flexible functional electronic devices based on 2D materials.