• 文献标题:   Mobility in graphene double gate field effect transistors
  • 文献类型:   Article
  • 作  者:   LEMME MC, ECHTERMEYER TJ, BAUS M, SZAFRANEK BN, BOLTEN J, SCHMIDT M, WAHLBRINK T, KURZ H
  • 作者关键词:   graphene, field effect transistor, mobility, soi
  • 出版物名称:   SOLIDSTATE ELECTRONICS
  • ISSN:   0038-1101
  • 通讯作者地址:   AMO GmbH
  • 被引频次:   79
  • DOI:   10.1016/j.sse.2007.10.054
  • 出版年:   2008

▎ 摘  要

In this work, double-gated field effect transistors manufactured from monolayer graphene are investigated. Conventional top-down CMOS-compatible processes are applied except for graphene deposition by manual exfoliation. Carrier mobilities in single- and double-gated graphene field effect transistors are compared. Even in double-gated graphene FETs, the carrier mobility exceeds the universal mobility of silicon over nearly the entire measured range. At comparable dimensions, reported mobilities for ultra-thin body silicon-on-insulator MOSFETs cannot compete with graphene FET values. (c) 2007 Elsevier Ltd. All rights reserved.