• 文献标题:   Laser-induced growth of large-area epitaxial graphene with low sheet resistance on 4H-SiC(0001)
  • 文献类型:   Article
  • 作  者:   LIU ZZ, XU QF, ZHANG CTF, SUN QY, WANG CB, DONG MD, WANG ZG, OHMORI H, KOSINOVA M, GOTO T, TU R, ZHANG S
  • 作者关键词:   continuous laser, largearea, epitaxial graphene, 4hsic, sheet resistance
  • 出版物名称:   APPLIED SURFACE SCIENCE
  • ISSN:   0169-4332 EI 1873-5584
  • 通讯作者地址:   Wuhan Univ Technol
  • 被引频次:   0
  • DOI:   10.1016/j.apsusc.2020.145938
  • 出版年:   2020

▎ 摘  要

Multilayer graphene on SiC is a promising material due to its compatibility with modern electronics technology. Herein, we demonstrate the growth of large-area (similar to 10x5 mm(2)), high-quality (D/G area ratio: similar to 0.03) epitaxial graphene on 4H-SiC(0001) using a high-power continuous laser with an extremely fast heating rate of 500 degrees C/s. As the growth temperature rises from 1550 degrees C to 1780 degrees C, the number of graphene layers increases from three to more than ten. The obtained graphene/SiC samples are highly conductive, with a sheet resistance of as low as similar to 0.43 O/sq. The high power and fast heating rate of the laser contribute to the formation of large-area and low-sheet-resistance graphene. The high conductivity makes graphene/SiC a very promising material for applications in conductive films. The growth mechanism of graphene and the influence of the structural properties of graphene on the conductivity are also discussed.