▎ 摘 要
In this Letter, we report a graphene-based hybrid plasmonic modulator (GHPM) realized by employing the electro-absorption effect of graphene. The simulation results show that the modulation efficiency of GHPM, i.e., extinction ratio per length, can be as large as 0.417 dB/mu m, which is more than twice as much as that of recently presented graphene-on-silicon modulator. It was found that the improvement in modulation efficiency is mainly due to the enhancement of the overlap between graphene and the mode field in GHPM. A prototype of GHPM was fabricated. The measurement results showed that the GHPM can work in a broadband from 1530 to 1570 nm and an improved modulation efficiency of 1.08 dB (at 30 mu m). Finally, we have discussed the factors that influence the modulation efficiency. Our proof-of-concept design may promote the development of on-chip graphene-based plasmonic devices. (C) 2019 Optical Society of America