▎ 摘　　要

A method is proposed to form graphene films using thermodiffusion of carbon atoms from an amorphous carbon or silicon-carbon film with a nanosized thickness through a catalyst film, their accumulation at the catalyst layer/barrier layer interface, and the subsequent carbon quasi-liquid-graphene phase transition. One of the advantages of this method of producing graphene films is the possibility of their formation directly on a dielectric layer and the subsequent suspension of a graphene film over the substrate surface using membrane technologies, which excludes the necessity of using complex procedures to separate a graphene film from the substrate.