• 文献标题:   Graphene Field-Effect Transistors on Hexagonal-Boron Nitride for Enhanced Interfacial Thermal Dissipation
  • 文献类型:   Article
  • 作  者:   LIU DH, CHEN XS, ZHANG Y, WANG DG, ZHAO Y, PENG HS, LIU YQ, XU XF, WEE ATS, WEI DC
  • 作者关键词:   fieldeffect transistor, graphene, hexagonalboron nitride, interfacial thermal resistance, thermal dissipation
  • 出版物名称:   ADVANCED ELECTRONIC MATERIALS
  • ISSN:   2199-160X
  • 通讯作者地址:   Fudan Univ
  • 被引频次:   0
  • DOI:   10.1002/aelm.202000059 EA JUN 2020
  • 出版年:   2020

▎ 摘  要

Owing to its atomic thickness, thermal dissipation is one significant bottleneck for the practical application of graphene in electronics. Here, it is demonstrated that a high-quality ultraclean van der Waals interface can be obtained after modifying the SiO2/Si substrate with hexagonal-boron nitride (h-BN) by plasma-enhanced chemical vapor deposition, which improves the mobility and the interfacial thermal dissipation of graphene field-effect transistors (FETs). Onh-BN, interfacial thermal resistance decreases by more than 77% and the saturated power density of graphene FETs increases by 2-3-folds to 3.45 x 10(5)W cm(-2), higher than the power density of current CPUs (approximate to 100 W cm(-2)), demonstrating its potential in future graphene-based electronics.