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- 文献标题: Graphene oxide shields nano-etched silicon from oxidation
- 文献类型: Editorial Material
- 作 者: DYATKIN B
- 作者关键词: c, h, si, 2d material, graphene, nanoscale, oxide, semiconducting, coating, lithography removal
- 出版物名称: MRS BULLETIN
- ISSN: 0883-7694 EI 1938-1425
- 通讯作者地址:
- 被引频次: 0
- DOI: 10.1557/s43577-021-00237-7 EA JAN 2022
- 出版年: 2021
