• 文献标题:   Top-gate transistors fabricated on epitaxially grown molybdenum disulfide and graphene hetero-structures
  • 文献类型:   Article
  • 作  者:   TSAI PC, HUANG HC, CHIANG CT, WU CH, LIN SY
  • 作者关键词:   topgate transistor, 2d material heterostructure, passivation
  • 出版物名称:   APPLIED PHYSICS EXPRESS
  • ISSN:   1882-0778 EI 1882-0786
  • 通讯作者地址:  
  • 被引频次:   1
  • DOI:   10.35848/1882-0786/ac3546
  • 出版年:   2021

▎ 摘  要

We have demonstrated that by using the thermal evaporator, wafer-scale and uniform bi-layer MoS2 can be grown on graphene surfaces without introducing significant damage to the graphene channel. Compared with the top-gate transistors fabricated on standalone graphene films, the field-effect mobility value enhancement from 9.3 to 35.0 cm(2) V-1 center dot s(-1) is observed for the device fabricated on the MoS2/graphene hetero-structures, which suggests that the MoS2 layer can act as an efficient passivation layer to the graphene channel. Similar field-effect mobility values obtained for the device with only a mono-layer MoS2 passivation layer are also demonstrated.