▎ 摘　　要

Nanomechanical resonators offer brilliant mass and force sensitivity applied in many fields, owing to a low mass m and high-quality factor Q. However, in vibrating process, resonant energy is inevitably dissipated. Typically, quality factor does not surpass the inverse of the material loss angle phi. Recently, some exceptions emerged in the use of highly stressed silicon nitride material. As yet, it is interpreted that the pre-stress seems to "dilute" the intrinsic energy dissipation according to the Zener model. Is there any other material that could further break the 1/phi limit and achieve higher quality factors? In our previous research, through theoretical calculation and finite element simulation, we have proved that graphene's quality factor is two orders of magnitude larger than silicon nitride, on account of the extremely thin thickness of graphene. Based on this, we further optimize the structure of phononic crystals to achieve higher quality factors, in terms of duty cycle and cell size. Through simulation analysis, the quality factor could improve with a larger duty cycle and bigger cell size of triangular lattice phononic crystal. Unexpectedly, the Q amplification coefficient of the 3 x 5-cell structure, which is the least number to compose a phononic crystal with a central defect area, is the highest. In contrast, the minimal cell-number structure in hexagonal lattice could not achieve the brilliant dissipation dilution effect as well as the triangular one. Then we consider how overall size and stress influence quality factor and, furthermore, compare theoretical calculation and finite simulation. Lastly, we start from the primitive 3 x 5 cells, constantly adding cells to the periphery. Through simulation, to our surprise, the largest Q amplification coefficient does not belong to the largest structure, instead originating from the moderate one consisting of 7 x 13 cells.