▎ 摘　　要

In this paper, a radio-frequency circuit model of an interdigital capacitor (IDC) with a multilayer graphene (MLG) width variation is proposed. The circuit model with three sample configurations, i.e., a bare IDC, IDC-MLG with a width of 5 mu m, and IDC-MLG with a width of 20 mu m, is constructed via a fitted method based on the measured samples. The simulated results of the circuit model are validated through the RF characteristics, e.g., the capacitance and the self-resonance frequency, of the measured samples. From the circuit model, all samples show not only a similar capacitance behavior but also an identical self-resonance frequency of 10GHz. Moreover, the R, L, and C values of MLG with a 5 mu m width (MLG with a 20 mu m width) alone are approximately 0.8 k Omega (0.5 k Omega), 0.5 nH (0.9 nH), and 0.3 pF (0.1 pF), respectively. As a result, we find that the simulated results are in good agreement with RF characteristics of the measured samples. In the future, we expect that the proposed circuit model of an IDC with MLG will offer assistance with performance predictions of diverse IDC-based 2D material applications, such as biosensors and gas sensors, as well as supercapacitors. Published by AIP Publishing.