• 文献标题:   The effect of chemical residues on the physical and electrical properties of chemical vapor deposited graphene transferred to SiO2
  • 文献类型:   Article
  • 作  者:   PIRKLE A, CHAN J, VENUGOPAL A, HINOJOS D, MAGNUSON CW, MCDONNELL S, COLOMBO L, VOGEL EM, RUOFF RS, WALLACE RM
  • 作者关键词:  
  • 出版物名称:   APPLIED PHYSICS LETTERS
  • ISSN:   0003-6951
  • 通讯作者地址:   Univ Texas Dallas
  • 被引频次:   602
  • DOI:   10.1063/1.3643444
  • 出版年:   2011

▎ 摘  要

The effects of residues introduced during the transfer of chemical vapor deposited graphene from a Cu substrate to an insulating (SiO2) substrate on the physical and electrical of the transferred graphene are studied. X-ray photoelectron spectroscopy and atomic force microscopy show that this residue can be substantially reduced by annealing in vacuum. The impact of the removal of poly(methyl methacrylate) residue on the electrical properties of graphene field effect devices is demonstrated, including a nearly 2 x increase in average mobility from 1400 to 2700 cm(2)/Vs. The electrical results are compared with graphene doping measurements by Raman spectroscopy. (C) 2011 American Institute of Physics. [doi: 0.1063/1.3643444]