• 文献标题:   Fast Synthesis of High-Performance Graphene Films by Hydrogen-Free Rapid Thermal Chemical Vapor Deposition
  • 文献类型:   Article
  • 作  者:   RYU J, KIM Y, WON D, KIM N, PARK JS, LEE EK, CHO D, CHO SP, KIM SJ, RYU GH, SHIN HAS, LEE Z, HONG BH, CHO S
  • 作者关键词:   graphene, transparent, flexible, foldable, touch screen, chemical vapor deposition
  • 出版物名称:   ACS NANO
  • ISSN:   1936-0851 EI 1936-086X
  • 通讯作者地址:   Seoul Natl Univ
  • 被引频次:   119
  • DOI:   10.1021/nn405754d
  • 出版年:   2014

▎ 摘  要

The practical use of graphene in consumer electronics has not been demonstrated since the size, uniformity, and reliability problems are yet to be solved to satisfy industrial standards. Here we report mass-produced graphene films synthesized by hydrogen-free rapid thermal chemical vapor deposition (RT-CVD), roll-to-roll etching, and transfer methods, which enabled faster and larger production of homogeneous graphene films over 400 x 300 mm(2) area with a sheet resistance of 249 +/- 17 Omega/sq without additional doping. The properties of RT-CVD graphene have been carefully characterized by high-resolution transmission electron microscopy, Raman spectroscopy, chemical grain boundary analysis, and various electrical device measurements, showing excellent uniformity and stability. In particular, we found no significant correlation between graphene domain sizes and electrical conductivity, unlike previous theoretical expectations for nanoscale graphene domains. Finally, the actual application of the RT-CVD films to capacitive multitouch devices installed in the most sophisticated mobile phone was demonstrated.