• 文献标题:   Multi-layer graphene treated by O-2 plasma for transparent conductive electrode applications
  • 文献类型:   Article
  • 作  者:   FENG TT, XIE D, TIAN H, PENG PG, ZHANG D, FU D, REN TL, LI XM, ZHU HW, JING YP
  • 作者关键词:   graphene, transparent conductive electrode, chemical vapor deposition, optical materials propertie, etching
  • 出版物名称:   MATERIALS LETTERS
  • ISSN:   0167-577X EI 1873-4979
  • 通讯作者地址:   Tsinghua Univ
  • 被引频次:   6
  • DOI:   10.1016/j.matlet.2011.12.121
  • 出版年:   2012

▎ 摘  要

Multi-layer graphene (MLG) films have been deposited on nickel film employing chemical vapor deposition (CVD) technique and oxygen plasma-based treatment method is introduced to tune the properties of MLG films after the transfer process. A MLG of 32 nm (similar to 90 layer) was reduced to 12 nm (similar to 30 layer) in 60 s with sheet resistance of 550 Omega/square and transmittance of 83%. The geometrical dimensions, optical transmittance and sheet resistance evolution of the films during the treatment process are investigated. The method suggested in this paper yields controllability of the MLG film thickness and the electrical and optical properties after the transfer process and device fabrication, which has great potentials for transparent conductive electrode applications. (C) 2012 Elsevier B.V. All rights reserved.