• 文献标题:   A Hybrid-Type CVD System for Graphene Growth
  • 文献类型:   Article
  • 作  者:   SKOBLIN G, LINDVALL N, SUN J, YURGENS A
  • 作者关键词:   coldwall, graphene, nucleation density, pyrolysi
  • 出版物名称:   CHEMICAL VAPOR DEPOSITION
  • ISSN:   0948-1907 EI 1521-3862
  • 通讯作者地址:   Chalmers Univ Technol
  • 被引频次:   1
  • DOI:   10.1002/cvde.201507163
  • 出版年:   2015

▎ 摘  要

A cold-wall CVD system for graphene growth on metal foils is converted to an effectively hot-wall one by merely adding another heater, sandwiching the foil in between the heaters. This simple design demonstrates both an improved temperature uniformity characteristic for hot-wall systems, and a high responsivity distinctive for cold-wall ones. This beneficial combination allows for a much better control of graphene growth kinetics.