• 文献标题:   Fabrication of high-quality graphene by hot-filament thermal chemical vapor deposition
  • 文献类型:   Article
  • 作  者:   HAFIZ SM, CHONG SK, HUANG NM, RAHMAN SA
  • 作者关键词:  
  • 出版物名称:   CARBON
  • ISSN:   0008-6223 EI 1873-3891
  • 通讯作者地址:   Univ Malaya
  • 被引频次:   13
  • DOI:   10.1016/j.carbon.2015.01.018
  • 出版年:   2015

▎ 摘  要

To the best of our knowledge, the previously reported graphene fabricated using catalytic chemical vapor deposition techniques contained a high defect density, which will hinder its opto-electronic properties. In this work, the effects of two crucial parameters, namely deposition time and hydrogen flow rate on the growth of graphene using a hot-filament thermal chemical vapor deposition technique were systematically studied. Fabrications were conducted at substrate and filament temperatures of 1000 degrees C and 1750 degrees C, respectively. Very low I-D/I-G ratios (<< 0.1) were obtained for all the samples, which reflected the formation of high-quality graphene deposited on Cu foils. A quasi-static equilibrium copper vapor inside an alumina tube was found to be an important factor to obtain a low defect density graphene. A growth mechanism was then proposed, where the cuprous oxide (Cu2O) acted as a nucleation site for graphene growth. (C) 2015 Elsevier Ltd. All rights reserved.