▎ 摘　　要

A self-focusing e-beam evaporator for carbon flux source in a molecular beam epitaxy (MBE) system has been designed and optimized. It is found that the configuration of the e-beam evaporator is very important for the solid carbon evaporation. According to the electric field simulation and the followed suitable design, the self-focusing e-beam evaporator for carbon flux evaporation can be achieved with high efficiency and good stability. This easy designed e-beam evaporator is adopted to produce stable and controllable carbon flux in a MBE system for large-area graphene layers preparation, which shows promising application for graphene-based device fabrication in the future. (C) 2014 Elsevier B.V. All rights reserved.