• 文献标题:   Graphene transport properties upon exposure to PMMA processing and heat treatments
  • 文献类型:   Article
  • 作  者:   GAMMELGAARD L, CARIDAD JM, CAGLIANI A, MACKENZIE DMA, PETERSEN DH, BOOTH TJ, BOGGILD P
  • 作者关键词:   graphene, pmma, electrical device, heat treatment
  • 出版物名称:   2D MATERIALS
  • ISSN:   2053-1583
  • 通讯作者地址:   Tech Univ Denmark
  • 被引频次:   35
  • DOI:   10.1088/2053-1583/1/3/035005
  • 出版年:   2014

▎ 摘  要

The evolution of graphene's electrical transport properties due to processing with the polymer polymethyl methacrylate (PMMA) and heat are examined in this study. The use of stencil (shadow mask) lithography enables fabrication of graphene devices without the usage of polymers, chemicals or heat, allowing us to measure the evolution of the electrical transport properties during individual processing steps from the initial as-exfoliated to the PMMA-processed graphene. Heating generally promotes the conformation of graphene to SiO2 and is found to play a major role for the electrical properties of graphene while PMMA residues are found to be surprisingly benign. In accordance with this picture, graphene devices with initially high carrier mobility tend to suffer a decrease in carrier mobility, while in contrast an improvement is observed for low carrier mobility devices. We explain this by noting that flakes conforming poorly to the substrate will have a higher carrier mobility which will however be reduced as heat treatment enhance the conformation. We finally show the electrical properties of graphene to be reversible upon heat treatments in air up to 200 degrees C.