• 文献标题:   Graphene-Enhanced Metal Transfer Printing for Strong van der Waals Contacts between 3D Metals and 2D Semiconductors
  • 文献类型:   Article
  • 作  者:   QI DY, LI P, OU HH, WU D, LIAN WG, WANG Z, OUYANG FP, CHAI Y, ZHANG WJ
  • 作者关键词:   2d electronic, metal induced gap state, metal transfer printing, van der waals contact
  • 出版物名称:   ADVANCED FUNCTIONAL MATERIALS
  • ISSN:   1616-301X EI 1616-3028
  • 通讯作者地址:  
  • 被引频次:   0
  • DOI:   10.1002/adfm.202301704 EA APR 2023
  • 出版年:   2023

▎ 摘  要

2D semiconductors have shown great potentials for ultra-short channel field-effect transistors (FETs) in next-generation electronics. However, because of intractable surface states and interface barriers, it is challenging to realize high-quality contacts with low contact resistances for both p- and n- 2D FETs. Here, a graphene-enhanced van der Waals (vdWs) integration approach is demonstrated, which is a multi-scale (nanometer to centimeter scale) and reliable (approximate to 100% yield) metal transfer strategy applicable to various metals and 2D semiconductors. Scanning transmission electron microscopy imaging shows that 2D/2D/3D semiconductor/graphene/metal interfaces are atomically flat, ultraclean, and defect-free. First principles calculations indicate that the sandwiched graphene monolayer can eliminate gap states induced by 3D metals in 2D semiconductors. Through this approach, Schottky barrier-free contacts are realized on both p- and n-type 2D FETs, achieving p-type MoTe2, p-type black phosphorus and n-type MoS2 FETs with on-state current densities of 404, 1520, and 761 mu A mu m(-1), respectively, which are among the highest values reported in literature.