• 文献标题:   Long-term stability of photodetectors based on graphene field-effect transistors encapsulated with Si3N4 layers
  • 文献类型:   Article
  • 作  者:   SU F, ZHANG ZH, LI SS, LI PA, DENG T
  • 作者关键词:   graphene, fet, photodetector, si3n4, longterm stability
  • 出版物名称:   APPLIED SURFACE SCIENCE
  • ISSN:   0169-4332 EI 1873-5584
  • 通讯作者地址:   Beijing Jiaotong Univ
  • 被引频次:   1
  • DOI:   10.1016/j.apsusc.2018.07.208
  • 出版年:   2018

▎ 摘  要

Graphene photodetectors have drawn a lot of interest due to their superior properties. For entering real applications, the existing open-face graphene photodetectors need to be properly protected to obtain long term stability. Here we demonstrate a facile method to obtain air-stable graphene photodetectors by directly depositing Si3N4 layer on the surface of buried-gate graphene field-effect transistors (GFETs). The electrical and photoelectrical properties of the Si3N4-encapsulated GFETs were carefully investigated and compared with that of the reference open-face GFETs. A photoresponsivity of 6.3 mA/W was obtained under a gate bias of 6 V, which was over 4 times higher than the photoresponsivities of typical back-gated GFET photodetectors under gate biases up to 80 V. Furthermore, the Si3N4-encapsulated GFET photodetectors demonstrated good stability for several months.