▎ 摘　　要

Multilayer graphene films were synthesized on copper foil by means of low pressure chemical vapor deposition and characterized using Raman spectroscopy. Low energy nitrogen bombardment was performed to form N-doped graphene, which is a metal catalyst method to induce nitrogen disorder in the carbon network. In order to investigate the effect of the nitrogen bombardment on graphene, Raman spectroscopy, X-ray photoelectron spectroscopy, scanning electron microscopy and atomic force microscopy are used. Analysis before and after the bombardment reveals that nitrogen doping of graphene is performed successfully by this method.