• 文献标题:   CVD diamond film detectors for a particles with a new electrode structure of reduced graphene oxide/Au
  • 文献类型:   Article
  • 作  者:   ZHANG ZL, HUANG J, XI YF, ZHOU XY, TANG K, XIA YB, LU YC, WANG LJ
  • 作者关键词:   alpha particle irradiation, diamond film, rgo/au electrode, ohmic contact, raman spectroscopy
  • 出版物名称:   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
  • ISSN:   1369-8001 EI 1873-4081
  • 通讯作者地址:   Shanghai Univ
  • 被引频次:   2
  • DOI:   10.1016/j.mssp.2018.11.027
  • 出版年:   2019

▎ 摘  要

(111)-oriented poly-crystalline diamond films (PCDs) have been deposited on Si substrates by MPCVD technology. The new electrode structure of reduced graphene oxide (RGO)/Au was successfully fabricated onto PCDs. Using the circular transmission line model (CTLM), the contact resistance of 6.6 Omega cm(-2) was obtained for RGO/Au electrode on PCD surface, which was notably lower than that of 97.4 Omega cm(-2) for Ti/Pt/Au electrode. Furthermore, two detectors with these two type electrodes were made respectively. The dark current, photocurrent and energy resolution of these two detectors under 5.5 MeV alpha particles irradiation from a Am-241 source were observed. The results demonstrated that the fabrication of RGO/Au electrode onto PCD can realize a fine ohmic contact. The photocurrent of 58.7 nA for the detector with RGO/Au electrode had higher values than that of 8.8 nA for the detector with Ti/Pt/Au electrode at the bias voltage of 100 V respectively. Due to the realization of good contact on PCD surface with RGO/Au electrode, the energy resolution of 11.9% for the detector with RGO/Au electrode better than that of 24% for the detector with Ti/Pt/Au electrode can be obtained. Fabrication of the RGO/Au electrode on PCD may provide a feasible way to improve its detection performance under alpha particles irradiation.