• 文献标题:   Flexible Pressure Sensors with a Sandwich Structure Based on Vertical Graphene Nanowalls by HFCVD
  • 文献类型:   Article
  • 作  者:   MAO WB, SHEN HL, WANG ZH, LIAO BJ, ZHANG JZ, ZHU JK, LI YF, WU TR
  • 作者关键词:   hfcvd, vertical graphene nanowall, sandwich structure, flexible pressure sensor, signal detection
  • 出版物名称:   JOURNAL OF ELECTRONIC MATERIALS
  • ISSN:   0361-5235 EI 1543-186X
  • 通讯作者地址:  
  • 被引频次:   0
  • DOI:   10.1007/s11664-022-10101-2 EA DEC 2022
  • 出版年:   2023

▎ 摘  要

Recently, flexible pressure sensors have been developed rapidly and used in human-computer interaction, healthcare wearable devices, and electronic skins. Vertical graphene nanowalls (VGNs) have aroused tremendous attention owing to their high electrical conductivity, thermal conductivity, and larger specific surface area, etc. Herein, VGNs were prepared at a low temperature (400?) by hot filament chemical vapor deposition (HFCVD). A flexible pressure sensor with a sandwich structure was then developed by combining VGN film and polydimethylsiloxane (PDMS) elastomer. The flexible pressure sensors have good sensitivity (S = 13.0 kPa(-1) for the 0-1 kPa region), a fast response speed (142 ms), and a quick recovery speed (96 ms). In addition, the sensitivity can be adjusted by controlling the thickness of the VGNs, while sensors composed of thicker VGNs show higher sensitivity. Furthermore, the flexible pressure sensors show great potential for application in human motion detection and pressure measurement.